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Operation of the yellow light area in the semiconductor clean room

Operation of the yellow light area in the semiconductor clean room

1.Humidity and temperature can affect the alignment, in the yellow light area should pay attention to the temperature and humidity, and should reduce the alignment machine nearby, in order to reduce the change of humidity, the temperature.

2.The chip which has not yet been completed photoresist exposure, shall not carry out the yellow area in order to avoid light.

3.If already photoresist exposured and waiting for the exposure of the chip, should be placed within a blue-black crystals of opaque box, and the lid must cover well.

4.Take edge when mask is using, and can not touch the mask, under any condition, chromium mask film can not contact with bricks, in case of scratch, the falling dust of mask can be blew by nitrogen gun.

5.When exposuring, should avoid eyes direct to the exposure machine mercury lamp.

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